3. Results and Discussion<br>3.1. The Influences of Different Ar/C2H? Flow Ratios<br>nan spectra of the Cr-C films deposited at different Ar/C2H2 flow ratios and the pressure of 0.8 Pa for 10 min are shown in Figure 1. Only two major peaks, the G (~1580 cm^-1) and D(~1350cm^-1) bands of carbon phases, and a minor peak of Cr2O3 (~541 cm-1) phase can be identified. The peaks of chromium carbides are very weak. This indicates that the microstructure of deposited Cr-C films could be a composite of amorphous carbide, amorphous carbon phases, and metallic chromium phases. The intensities of D and G decrease with the fraction of C2H2. However, the estimated Ip/Ic values of the four samples are close to each other, with a difference of less than 2%, which means that the ratios of sp3 and sp2 bonds of the amorphous carbon phase of the four samples could be approximate. These results imply that the content of amorphous carbon phase decreases with the fraction of C2H2. A similar trend was also found in the direct current magnetron sputtering deposited Cr-C films [24].
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