The experiment found that the process for each oxygen atom will react. What influence the shape, size and depth of the micro-pattern that is more pressure. we use very do oxygen pressure of atom, the better reacting to cause breakdown easily. Therefore, the trial should take pressure of 50 Pa, because it would make the perfect micro-pattern and the time it takes to perform the reaction affects the chemical reactions of Pt do masking of DLC-coated and we should use the substrate around 9000s to 18000s will cause the reaction to both the material better than most.
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