The effect of the shape, size, and depth of micro - pattern, that is, pressure. The more we use very pressure, ทำปฏิ engine of oxygen. Atom will react better cause breakdown easier.So the experiments should be used pressure was 50 Pa because it would micro-pattern is perfect, and the time spent in การทำปฏิกิริยา affecting chemical reaction. Pt masking and of DLC-coated substrate.We should take about 9000s to 18000s will make both the materials react better to take a lot of time.
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